EFEM340-D08 Equipment Front End Module
- High speed and Long stroke, applicable for 12 ” cassette.
- Equipped with grating and safety standard is upgraded.
- Certified with SEMI S2 standard.
- Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
- Equipped with sensors to monitor device status.
- Support GUI interface for remote control. Integrate subsystems to provide a single command window.