HIWIN EFEM340-D08 Equipment Front End Module

FEATURES

  • High speed and Long stroke, applicable for 12 ” cassette.
  • Equipped with grating and safety standard is upgraded.
  • Certified with SEMI S2 standard.
  • Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
  • Equipped with sensors to monitor device status.
  • Support GUI interface for remote control. Integrate subsystems to provide a single command window.
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