EFEM320-D01 Equipment Front End Module
- Compatible with standard 8-inch SMIF.
- External control box design to maximize the internal space.
- Certified with SEMI S2 standard.
- Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
- Equipped with sensors to monitor device status.
- Equipped with barcode, label, and character recognition devices to provide the complete production tracking.