HIWIN EFEM320-D01 Equipment Front End Module


  • Compatible with standard 8-inch SMIF.
  • External control box design to maximize the internal space.
  • Certified with SEMI S2 standard.
  • Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
  • Equipped with sensors to monitor device status.
  • Equipped with barcode, label, and character recognition devices to provide the complete production tracking.
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