EFEM320-D06 Equipment Front End Module
- Applicable for 12”wafer and metal carrier.
- Upper panel electric cabinet design , the best choice for one to two.
- Certified with SEMI S2 standard.
- Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
- Equipped with sensors to monitor device status.
- Real-time image monitoring, equipped with barcode, label, and character recognition devices to provide the complete production tracking.
- Provide customized design for special wafer or panel.