HIWIN EFEM320-D06 Equipment Front End Module


  • Applicable for 12”wafer and metal carrier.
  • Upper panel electric cabinet design , the best choice for one to two.
  • Certified with SEMI S2 standard.
  • Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
  • Equipped with sensors to monitor device status.
  • Real-time image monitoring, equipped with barcode, label, and character recognition devices to provide the complete production tracking.
  • Provide customized design for special wafer or panel.
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