FEATURES

• Applicable for 12”wafer and metal carrier.
• Upper panel electric cabinet design , the best choice for one to two.
• Certified with SEMI S2 standard.
• Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
• Equipped with sensors to monitor device status.
• Real-time image monitoring, equipped with barcode, label, and character recognition devices to provide the complete production tracking.
• Provide customized design for special wafer or panel.