FEATURES

• Compatible with standard 8 and 12-inch cassette.
• Panel type electric cabinet design.
• Certified with SEMI S2 standard.
• Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
• Equipped with sensors to monitor device status.
• Real-time image monitoring, equipped with barcode, label, and character recognition devices to provide the complete production tracking.
• Provide customized design for special wafer or panel.