EFEM320-D02 Equipment Front End Module
- Compatible with standard 8 and 12-inch cassette.
- Panel type electric cabinet design.
- Certified with SEMI S2 standard.
- Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
- Equipped with sensors to monitor device status.
- Real-time image monitoring, equipped with barcode, label, and character recognition devices to provide the complete production tracking.
- Provide customized design for special wafer or panel.