EFEM220-D13 Equipment Front End Module
- Compatible with standard 6 and 8-inch open cassette.
- Provides flexible solution with a modular design.
- Certified with SEMI S2 standard.
- Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
- Equipped with sensors to monitor device status.
- Support GUI interface for remote control. Integrate subsystems to provide a single command window.