HIWIN EFEM220-D13 Equipment Front End Module


  • Compatible with standard 6 and 8-inch open cassette.
  • Provides flexible solution with a modular design.
  • Certified with SEMI S2 standard.
  • Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
  • Equipped with sensors to monitor device status.
  • Support GUI interface for remote control. Integrate subsystems to provide a single command window.
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