SUPPORT

RWS Wafer Robot

Documents

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Brochure



Software

Wafer Tool軟體需搭配正確的RCU8韌體版本,下載前請確認HRC-W/RC8控制器規格與軟體版本,如遇問題請聯繫上銀售服團隊。

Wafer Robot Wafer Tool Software

WaferTool_v1.6.1

Wafer Tool Software Installation Attachments

EtherCat & Serial Communication Driver

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.074

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