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HIWIN Load Port

FEATURE

Applicable for Various Specifications
HIWIN Load Port HLP series can be used for loading and unloading 8-inch and 12-inch multiple substrates and capable of docking with FOUP/FOSB. HIWIN also offers optional adaptors for 8-inch open cassette and 12-inch metal carrier.

Self-made Key Component
HIWIN Load Port HLP series is equipped with self-made key components including Ballscrew, Linear Guideway, and Single Axis Robot. The EFEM also integrates with HIWIN self-develop software. This makes HIWIN able to provide vertical integration and flexible solution to customers.

APPLICATIONS

Applied to various types of semiconductor process equipment, such as photolithography, etching,CVD, PVD, cleaning, testing, etc.
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