EFEM320-D03 Equipment Front End Module
- Compatible with standard 8 and 12-inch cassette.
- Hidden electric cabinet and aligner design, and the connection dock is maximized.
- Certified with SEMI S2 standard.
- Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
- Equipped with sensors to monitor device status.
- Provide customized design for special wafer or panel.
- Automatic pressure control system, through the change of ambient pressure, adjust the fan speed to maintain the set value.