HIWIN EFEM320-D03 Equipment Front End Module


  • Compatible with standard 8 and 12-inch cassette.
  • Hidden electric cabinet and aligner design, and the connection dock is maximized.
  • Certified with SEMI S2 standard.
  • Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
  • Equipped with sensors to monitor device status.
  • Provide customized design for special wafer or panel.
  • Automatic pressure control system, through the change of ambient pressure, adjust the fan speed to maintain the set value.
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