FEATURES

• Compatible with standard 8 and 12-inch cassette.
• Hidden electric cabinet and aligner design, and the connection dock is maximized.
• Certified with SEMI S2 standard.
• Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
• Equipped with sensors to monitor device status.
• Provide customized design for special wafer or panel.
• Automatic pressure control system, through the change of ambient pressure, adjust the fan speed to maintain the set value.