HIWIN EFEM320-D03 Equipment Front End Module

FEATURES

  • Compatible with standard 8 and 12-inch cassette.
  • Hidden electric cabinet and aligner design, and the connection dock is maximized.
  • Certified with SEMI S2 standard.
  • Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
  • Equipped with sensors to monitor device status.
  • Provide customized design for special wafer or panel.
  • Automatic pressure control system, through the change of ambient pressure, adjust the fan speed to maintain the set value.
We use cookies to help us improve our webpage. Please read and agree to our Privacy PolicyAgree