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Load Port

Feature

Applicable for Various Specifications
HIWIN Load Port HLP series can be used for loading and unloading 8-inch and 12-inch multiple substrates and capable of docking with FOUP/FOSB. HIWIN also offers optional adaptors for 8-inch open cassette and 12-inch metal carrier.

Self-made Key Component
HIWIN Load Port HLP series is equipped with self-made key components including Ballscrew, Linear Guideway, and Single Axis Robot. The EFEM also integrates with HIWIN self-develop software. This makes HIWIN able to provide vertical integration and flexible solution to customers.

Shared Specification
8" + 12"
Certification
SEMI-S2
Cleanliness class
Class 1
APPLICATION
photolithographyetchingCVDPVD
HIWIN Technical Support