SUPPORT

RWS Wafer Robot

Documents

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Brochure

Manipulator Module

RWS-T-Z340-R135

3D

RWS-T-Z340-R185

3D

RWS-T-Z400-R135

3D

RWS-T-Z400-R185

3D

RWS-T-Z500-R135

3D

RWS-T-Z500-R185

3D

RWS-B-Z340-R135

3D

RWS-B-Z340-R185

3D

RWS-B-Z400-R135

3D

RWS-B-Z400-R185

3D

RWS-B-Z500-R135

3D

RWS-B-Z500-R185

3D

HRC-W401 Controller Manipulator

2D 3D

End Module


DW-Ata-R135-035

SR-Ata-R135-035

3D
SR-Ata-R185-035

SR-Ata-R185-035

3D
SR-Ata-R185-060

SR-Ata-R185-060

3D
SR-Rta-R135-035

SR-Rta-R135-035

3D
SR-Rta-R185-035

SR-Rta-R185-035

3D

Fork

F02

F02

3D
F04

F04

3D
F08

F08

3D
F08

F21

3D
F31

F31

3D
F34

F34

3D
F148

F148

3D
F262

F262

3D
F275

F275

3D


Software

Wafer Tool軟體需搭配正確的RCU8韌體版本,下載前請確認HRC-W/RC8控制器規格與軟體版本,如遇問題請聯繫上銀售服團隊。

Wafer Robot Wafer Tool Software

WaferTool_v1.5.10

Wafer Tool Software Installation Attechments

EtherCat & Serial Communication Driver

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.063

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.064

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.065

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.066

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.068

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.069

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.070

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.071

Wafer Tool software RCU8 attachment for HRC-W Controller

RCU8-0.072

Wafer Tool software RCU8 attachment for RC8-V1 Controller

RCU8-1.068

Wafer Tool software RCU8 attachment for RC8-V1 Controller

RCU8-1.069

Wafer Tool software RCU8 attachment for RC8-V1 Controller

RCU8-1.070

Wafer Tool software RCU8 attachment for RC8-V1 Controller

RCU8-1.071

Wafer Tool software RCU8 attachment for RC8-V1 Controller

RCU8-1.072

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