SUPPORT

RWD Wafer Robot

Documents

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Brochure

Manipulator Module

RWD-T-Z340-R135

3D

RWD-T-Z340-R185

3D

RWD-T-Z400-R135

3D

RWD-T-Z400-R185

3D

RWD-T-Z500-R135

3D

RWD-T-Z500-R185

3D

RWD-B-Z340-R135

3D

RWD-B-Z340-R185

3D

RWD-B-Z400-R135

3D

RWD-B-Z400-R185

3D

RWD-B-Z500-R135

3D

RWD-B-Z500-R185

3D

HRC-W401 Controller Manipulator

2D 3D

W(Left) Arm End Module

DW-Ata-R135-035

DW-Ata-R135-035

3D
DW-Ata-R185-035

DW-Ata-R185-035

3D
DW-Ata-R185-060

DW-Ata-R185-060

3D
DW-CtaEC-R135-050

DW-CtaEC-R135-050

3D
DW-CtaRC-R135-050

DW-CtaRC-R135-050

3D

R(right) Arm End Module

DR-Ata-R135-035

DR-Ata-R135-035

3D
DR-Ata-R185-035

DR-Ata-R185-035

3D
DR-Ata-R185-060

DR-Ata-R185-060

3D
DR-CtaEC-R135-050

DR-CtaEC-R135-050

3D
DR-CtaRC-R135-050

DR-CtaRC-R135-050

3D

Fork

F02

F02

3D
F04

F04

3D
F08

F08

3D
F08

F21

3D
F31

F31

3D
F34

F34

3D
F148

F148

3D
F262

F262

3D
F275

F275

3D


Software

Wafer Tool軟體需搭配正確的RCU8韌體版本,下載前請確認HRC-W/RC8控制器規格與軟體版本,如遇問題請聯繫上銀售服團隊。

晶圓機器人 Wafer Tool 軟體

WaferTool_v1.5.1

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.063

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.064

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.065

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.066

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.068

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.069

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.070

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.071

Wafer Tool 軟體RCU8附件
FOR HRC-W 控制器

RCU8-0.072

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